About Semiconductor equipment

With constant innovation in its optical and control technologies, Canon's state-of-the-art lithography equipments remain at the forefront. Producing integrated circuits and chips fast and precisely, they continue to serve the industry demands of high performance and functionality.

Support software

Support software
Our semiconductor equipment software plays a vital role in increasing total productivity. With a platform that is able to connect multiple CPUs / OSs and a plug-in framework that supports basic control and data management, they work to satisfy and adapt to the needs of diversifying semiconductor manufacturers.

Productive power

Productive power
Stage Synchronisation Technology, optimal exposure fields and clever automation features have been combined in the design of Canon's semiconductor equipments to meet the industry's high volume and production demands. Enjoy accelerated throughput, without compromise in accuracy.

Absolute accuracy

Absolute accuracy
When precision is a must, you'll benefit from the highest stage and alignment accuracy in the industry. With advanced wafer stage system developments and innovative mask alignment technologies, you can be assured of pinpoint accuracy.